Books.org participates in affiliate programs including Bookshop.org and the Amazon Services LLC Associates Program. We may earn a commission from qualifying purchases made through links on this page, at no additional cost to you.
Overview
This book provides you with in-depth coverage of the models, governing equations, and numerical techniques suitable for process simulation — so you can give your designs the competitive edge. You will understand the basic principles of transport phenomena, gas phase, and surface reactions in electronics material processing, and learn practical numerical techniques used in process simulations.
Synopsis
This book provides you with in-depth coverage of the models, governing equations, and numerical techniques suitable for process simulation — so you can give your designs the competitive edge. You will understand the basic principles of transport phenomena, gas phase, and surface reactions in electronics material processing, and learn practical numerical techniques used in process simulations.
Booknews
As an introduction to the subject for beginners or reference for experienced modelers, this volume provides a unified treatment of the models, governing equations and numerical methods, and a review of successful semiconductor process simulations from the literature. Following an introductory chapter, the remaining five chapters address an outline of numerical methods; crystal growth; chemical vapor deposition processes; plasma process modeling; and rapid thermal processing. Annotation c. Book News, Inc., Portland, OR (booknews.com)