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Overview
This up-to-date handbook covers the main topics of preparation, characterization and properties of complex metal-based layer systems. The authors — an outstanding group of researchers — discuss advanced methods for structure, chemical and electronic state characterization with reference to the properties of thin functional layers.
This second edition has been completely revised and updated to reflect the rapid progress taking place in the field, including, for example, investigations of the interface between barrier layer and dielectrics in metallization systems, spin-torque induced magnetic switching in spintronics, the development of new metallization technologies for migration-resistant SAW devices, and advancements in the nanoanalytics of thin functional layers.
In addition, several new sections and chapters highlight new and timely research topics, with a whole chapter now devoted to photovoltaics.
As such, the book addresses materials specialists in industry, especially in microelectronics, as well as scientists, while also recommended for advanced studies in materials science, analytics, surface and solid state science.
Synopsis
This up-to-date handbook covers the main topics of preparation, characterization and properties of complex metal-based layer systems. The authors—an outstanding group of researchers—discuss advanced methods for structure, chemical and electronic state characterization with reference to the properties of thin functional layers, such as metallization and barrier layers for microelectronics, magnetoresistive layers for GMR and TMR, sensor and resistance layers. As such, the book addresses materials specialists in industry, especially in microelectronics, as well as scientists, and can also be recommended for advanced studies in materials science, analytics, surface and solid state science.
Editorials
From the Publisher
"...I can certainly agree with the final sentence of the book cover: A perfect introduction to the field-for professionals and students."
Angewandte Chemie 2004 No. 11, Uwe Bornscheuer
"Through its focus on practical aspects and its didactic approach, the book is designed especially for practitioners. It can be highly recommended to materials engineers, physicists or process engineers who work or plan to work in the still exciting field of micro electronics."
Winfried Blau, European Society of Thin Films, Dresden