Polymers in Microlithography: Materials and Processes
Elsa Reichmanis (Editor), Takao Iwayanagi (Editor), Scott A. MacDonaldBooks.org participates in affiliate programs including Bookshop.org and the Amazon Services LLC Associates Program. We may earn a commission from qualifying purchases made through links on this page, at no additional cost to you.
Overview
This volume examines the role polymeric materials play in the electronics industry, with special emphasis on recent advances in the science and technology of resist materials and processing for microlithography. It provides the reader with an appreciation for the diversity of chemical research efforts that are required for the development of new resist materials and processes. Its 26 chapters are divided into three sections covering chemically applied resist chemistry, multilevel resist chemistry and processing, and novel chemistry and processes for microlithography. Each section contains an introduction written by a recognized expert in the field.
Synopsis
This volume examines the role polymeric materials play in the electronics industry, with special emphasis on recent advances in the science and technology of resist materials and processing for microlithography. It provides the reader with an appreciation for the diversity of chemical research efforts that are required for the development of new resist materials and processes. Its 26 chapters are divided into three sections covering chemically applied resist chemistry, multilevel resist chemistry and processing, and novel chemistry and processes for microlithography. Each section contains an introduction written by a recognized expert in the field.
Booknews
Proceedings of a symposium held in Dallas, Texas, April 1989. Resist chemistry is a field that is rapidly changing because of demands placed on the technology by increases in product complexity. Here, 26 chapters are divided into three sections covering chemically applied resist chemistry, multilevel resist chemistry and processing and novel chemistry and processes for microlithography. Annotation c. Book News, Inc., Portland, OR (booknews.com)