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Overview
The interest in sensors, especially microsensors, dramatically increased during the last decade of the 20th century. This is due to decreasing prices of microsensors, increasingly more reliable fabrication technology, and wide experience in the design of microsensors. However, the possibilities for new sensor concepts are hardly explored, so the field is also expanding scientifically. We also observe that the applications of sensors is spreading into new fields and incorporation of sensors in complete microsystems has begun to take shape.
These proceedings report the newest results of research in sensor technology in The Netherlands and Belgium. They comprise design issues, sensor concepts, fabrication technology, systems aspects and packaging. Special aspects are the discussions of sensors for microfluidic systems as well as sensors for optical systems, integrated optics, and for optical telecommunication.
Audience: This book will be of interest to engineers active in the field of sensors, sensor systems, microsystems, and M(O)EMS.
Synopsis
Thirty-three contributions from researchers in The Netherlands and Belgium discuss recent research in sensor technology, with an emphasis on microsensors. A sampling of topics includes inexpensive MEMS packaging, electro-osmotic flow control in microfluidics systems, an amperometric sensor for the detection of redox activity, high capacity silicon load cells, and relative humidity sensors. The text is accompanied by black and white illustrations. Annotation c. Book News, Inc., Portland, OR (booknews.com)