Nanotechnology, Electronics - Circuits - Integrated, Electromagnetism - Electricity, Engineering - Electrical & Electronic, Electronics - Microelectronics, Electricity & Technology
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Overview
This proceedings contains 37 of the 42 papers given at the First International Symposium on Science and Technology of Dielectrics in Emerging Fields, held in April and May 2003 in Paris, France. The editors, who are at academic insitutions in the US, the Netherlands, and Canada, have grouped the papers into five topics: biosystems and microsystems, integrated optics and optical applications, materials processing, progress in electronics, and low-K and high-K dielectrics. Individual paper topics include controlled filling of silicon trenches with doped oxide for MEMS, optical and electronic properties of nanostructured silicon, properties of gallium nitride nanorods by hydride vapor phase epitaxy, and synthesis and characterization of zinc titanate doped with magnesium. Annotation ©2004 Book News, Inc., Portland, ORBook Details
Published
January 28, 2003
Publisher
Electrochemical Society, Incorporated
Pages
436
Format
Hardcover
ISBN
9781566773461