Technology - General & Miscellaneous, Electrical & Electronic Engineering, Technology - General & Miscellaneous, Electrical & Electronic Engineering, Engineering - General & Miscellaneous
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Overview
The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.Book Details
Published
March 31, 2011
Publisher
SPIE Press
ISBN
9780819485182