Technology, Aeronautics & Astronautics
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Synopsis
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications—practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
Book Details
Published
September 1, 1980
Publisher
Wiley, John & Sons, Incorporated
Format
Hardcover
ISBN
9780471078289