Mechanical Engineering - General & Miscellaneous, Physical & Theoretical Chemistry, Electronics - Microelectronics, Electronics - Semiconductors, Solid State Physics - General & Miscellaneous, Chemical Compounds & Molecules - General & Miscellaneous
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Overview
This book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS.Synopsis
This book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS.
Book Details
Published
June 1, 2006
Publisher
Imperial College Press
Pages
192
Format
Hardcover
ISBN
9781860946240