Simulation and Design of Microsystems and Microstructures

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Deals with factors affecting the design of microsystems and microstructures, which are in increasing demand because of improvements in the technology for manufacturing them and the emergence of micro-electro-mechanical systems. Recognizes that the high cost of prototyping makes the simulation of device properties in the design phase of utmost important. The 38 papers discuss the simulation supported design of LIGA microsystems, an architecture for process planning, automated simulation and analysis of electrostatic micromotors, optimization problems of semiconductor gas sensors, modelling metal alloy contacts to a semiconductor substrate, simulating encapsulation stress in a silicon membrane pump, and other topics. No subject index. Annotation c. Book News, Inc., Portland, OR (booknews.com)