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Overview
This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.
Synopsis
This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.
Booknews
A comprehensive volume on the electron beam testing (EBT) of integrated circuits (ICs), drawing together both background material and recent developments. The text is divided into three parts. Part I is introductory, explaining why such technology has achieved its current status in IC testing, and its basic principles. Part II is a reference section which discusses the fundamental elements of the subject. Part III concentrates on the practical and implementational aspects of the technology, such as test automation and device handling, and includes case studies. Annotation c. Book News, Inc., Portland, OR (booknews.com)