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Physics of Light - Spectrum Analysis, Nanotechnology, Analytical Chemistry - General & Miscellaneous, Solid State Physics - Thin Films, Electronics - Semiconductors, Crystallography, Solid State Physics - General & Miscellaneous
High-Resolution X-Ray Scattering from Thin Films and Lateral Nanostructures by Ulrich Pietsch β€” book cover

High-Resolution X-Ray Scattering from Thin Films and Lateral Nanostructures

by Ulrich Pietsch, Tilo Baumbach, Vaclav Holy
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Overview

The book presents a detailed description of high-resolution x-ray scattering methods suitable for the investigation of the real structure of single-crystalline layers and multilayers, including structure defects in the layers and at the interfaces. Particular attention is devoted to lateral structures in semiconductors and semiconductor multilayers such as quantum wires and quantum dots. Both the theoretical background and the application of the methods are discussed. The second edition is extended to deal with lateral surface nanostructures such as gratings and dots, new examples for measuring layer thickness, lattice mismatch, and surface/interface roughness. The book will be an invaluable source for graduates and scientists.

Synopsis

The book presents a detailed description of high-resolution x-ray scattering methods suitable for the investigation of the real structure of single-crystalline layers and multilayers, including structure defects in the layers and at the interfaces. Particular attention is devoted to lateral structures in semiconductors and semiconductor multilayers such as quantum wires and quantum dots. Both the theoretical background and the application of the methods are discussed. The second edition is extended to deal with lateral surface nanostructures such as gratings and dots, new examples for measuring layer thickness, lattice mismatch, and surface/interface roughness. The book will be an invaluable source for graduates and scientists.

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Book Details

Published
October 1, 2004
Publisher
Springer-Verlag New York, LLC
Pages
424
Format
Hardcover
ISBN
9780387400921

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