Integrated Circuits and Semiconductor Devices: Theory and Application

64 to 256-Megabit Reticle Generation: Technology Requirements and Approaches

1998 Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications

Optoelectronic Integrated Circuits IV

Optoelectronic Integrated Circuits and Packaging V: 24-26 January, 2001, San Jose, [California] USA

Lithography for Semiconductor Manufacturing II: 30 May-1 June, 2001, Edinburgh, UK

Optoelectronic Integrated Curcuits

Optoelectronic Integrated Circuits IX: 22-24 January 2007, San Jose, California, USA

Principles of Lithography, Second Edition

High Speed Photonic Devices

17th Annual Bacus Symposium on Photomask Technology and Management