Electronics - Circuits - Integrated, Electronics - Microelectronics, Electronics - Optoelectronics
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Overview
This introduction to the science of microlithography focuses on the tools used to manufacture integrated circuits. It covers in-depth overlay, stages of exposure tools, and light sources. It also contains references for students who want to investigate other topics in more detail. This second edition includes new material on optical proximity corrections, next-generation lithography and other recent developments in the field. Additional problems have been added to each chapter. Annotation ©2004 Book News, Inc., Portland, ORBook Details
Published
February 1, 2004
Publisher
SPIE Press
Pages
438
Format
Hardcover
ISBN
9780819456601