Lithography Process Control

"...intend as a self-contained tutorial that works both as an introduction for those entering the field and as a reference for the experienced lithography engineer."

Booknews

Suitable as a self-contained tutorial introduction to the field and as a reference for the lithography engineer, this volume reviews the foundations of statistical process control as a background to more advanced topics including sampling; simple and complex processes; linewidth control; overlay; yield; process drift and automatic process control; metrology; and control of operations. Annotation c. Book News, Inc., Portland, OR (booknews.com)