Electronics - Circuits - Integrated, Electronics - Microelectronics, Electronics - Optoelectronics
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Overview
For readers who are unfamiliar with the area but have a solid foundation in basic physics and chemistry and elementary calculus, Levinson introduces the science of microlithography. He explains complex situations with simple models that describe most of the relevant physics, and considers the remaining effects as perturbations. Among the more advanced topics he tackles are light sources, photomasks, next-generation lithography, overlay, and photoresists. Annotation c. Book News, Inc., Portland, OR (booknews.com)Book Details
Published
May 1, 2001
Publisher
SPIE Society of Photo-Optical Instrumentation Engi
Pages
410
Format
Hardcover
ISBN
9780819440457