Introduction To Microelectromechanical(Mem)Microwave Systems

"...explains the physics of MEMS & their applications in electronic communication systems...integrates fabrication technology, device design-oriented materials, mechanical & microwave considerations & RF/microwave electronics.

Microelectromechanical systems (MEMS) applications in RF and microwave electronics are on the verge of revolutionizing wireless communications. Now you can sharpen your understanding of this emerging field with this comprehensive new book that explains the fabrication and fundamental physics of MEMS and their applications in electronic communication systems. The book's unique presentation integrates circuit fabrication technology, device design-oriented materials, mechanical and microwave considerations, and RF/microwave electronics to give engineers and managers a clear understanding of the potential and limitations of MEMS in electronic communications.

Booknews

Addressing the emerging field of microelectromechanical systems fabrication and device technologies as applied to radio frequency and microwave wireless communications systems, this volume focuses on integrated circuit fabrication technology, mechanical and materials science and engineering of microscopic mechanisms, and RF and microwave electronics engineering. Intended for the beginning graduate student, assumes a B.S. in physics or engineering. Annotation c. by Book News, Inc., Portland, Or.

Héctor J. De Los Santos is a Scientist/Director of Future Enabling Technologies IR&D Program at the Hughes Space and Communications Company. He holds a Ph.D. in Electrical Engineering from Purdue University and is Senior Member of the IEEE and Member of Tau Beta Pi, Eta Kappa Nu, and Sigma Xi..