Electrical & Electronic Engineering, Industrial Engineering & Materials Science, Industries - General & Miscellaneous, Technology Industries, Electrical & Electronic Engineering, Industrial Engineering & Materials Science
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Overview
Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.Book Details
Published
April 30, 2013
Publisher
Springer-Verlag New York, LLC
Pages
282
Format
Paperback
ISBN
9783642872730