Microstereolithography and other Fabrication Techniques for 3D MEMS
Vijay K. Varadan, V. K. Varadan, Xiaoning JiangBooks.org participates in affiliate programs including Bookshop.org and the Amazon Services LLC Associates Program. We may earn a commission from qualifying purchases made through links on this page, at no additional cost to you.
Overview
This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS.
This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields.
It provides:
* A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques
* Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units
* Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding
* Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers This book will appeal to microelectronics engineers, as well as material technologists, and physicists working in industrial and academic research and development.
Synopsis
Three researchers (Pennsylvania State U.) discuss the fundamental principles of one of the techniques being developed to fabricate three-dimensional microelectromechanial systems (MEMS) devices using polymer, ceramic, metal, metal alloy, and other compatible materials either with or without silicon, the material most such techniques are limited to. The text is suitable for graduate and advanced undergraduate students, and can provide background for scientists and engineers in industry who currently use conventional silicon technology but might apply the new approach to the rapid prototyping of smart systems and MEMS components. Annotation c. Book News, Inc., Portland, OR (booknews.com)