Technology - General & Miscellaneous, Physics, Physics, Technology - General & Miscellaneous, Chemistry - General and miscellaneous, Electromagnetism, Energy & Power Resources, Electrical & Electronic Engineering, Industrial Engineering & Materials Scienc
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Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for sensors, integrated photonic circuits on silicon, and principles and implementation of artificial neural networks. The selected mixture of papers is meant to shed light on the science as well as the engineering aspects of emerging silicon based technologies. A video program unseen provides audiovisual documentation of the book's contents. Annotation c. Book News, Inc., Portland, OR booknews.comBook Details
Published
January 31, 1991
Publisher
Springer
Pages
292
Format
Hardcover
ISBN
9780792311126