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Overview
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.
A solutions manual is available upon request from the Wiley editorial board.
Synopsis
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.
A solutions manual is available upon request from the Wiley editorial board.
Booknews
A comprehensive guide to the fabrication, characterization, and operational principles of the entire spectrum of semiconductor sensing devices made from silicon and other semiconductors. It begins with a discussion of semiconductor sensor classification and terminology and moves on to a broad description of semiconductor technology, emphasizing bulk and surface micromachining. Each of the next seven chapters describes a particular sensor family, as defined by the physical, chemical, or biological input signal to which it responds. These families include acoustic and mechanical sensors; magnetic, radiation, and thermal sensors; and chemical sensors and biosensors. The final chapter, covering integrated sensors, addresses system and interface issues as well as special fabrication techniques. Annotation c. Book News, Inc., Portland, OR (booknews.com)