Run-to-Run Control in Semiconductor Manufacturing
James Moyne (Editor), Arnon M. Hurwitz (Editor), Enrique del CastilloBooks.org participates in affiliate programs including Bookshop.org and the Amazon Services LLC Associates Program. We may earn a commission from qualifying purchases made through links on this page, at no additional cost to you.
Overview
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
"Obtain the know how to incorporate run to run R2R control into your manufacturing capability, discover the key components and acquire the methodology for the R2R control for amny process."
Synopsis
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
Booknews
Moyne (electrical engineering and computer science, U. of Michigan), Enrique del Castillo (Pennsylvania State U.) and Arnon Max Hurwitz (Qualtech productivity Solutions and MiTeX Solutions, Inc.) present 20 contributions that provide a practical guide to the understanding, implementation, and use of run-to-run (R2R) control in semiconductor manufacturing and manufacturing in general. They provide insight into the development, integration, application, enhancement, and operation of R2R control, and point to new directions in R2R process control strategies. Topics include foundation for control, R2R control algorithms, integrating control, customization methodology, case studies, advanced topics, and summary and conclusions. Annotation c. Book News, Inc., Portland, OR (booknews.com)