Electronics - Circuits - VLSI

Silicon Processing for the VLSI Era Vol. 3: The Submicron MOSFET

Name: Silicon Processing for the VLSI Era Vol. 3: The Submicron MOSFET
Author: Stanley Wolf
ISBN: 9780961672157

by Stanley Wolf

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Overview

Silicon Processing For The VLSI Era is a three-volume treatise which provides a comprehensive, up-to-date treatment of this technology. Volume 1 covers the details of individual process steps used in fabricating silicon ICs. Volume 2 describes how these process steps are combined to make VLSI and ULSI structures. Volume 3 discusses the physics of MOS devices, emphasizing the link between submicron MOSFETs and their manufacturing processes. The books are an outgrowth of a set of intensive seminars conducted through the University of California Berkeley, Engineering Extension, for the past fifteen years. Over four thousand engineers and managers from more than 75 companies and government agencies have taken these courses since they were first presented in 1984.