Spectroscopic Ellipsometry and Reflectometry: A User's Guide
Harland G. Tompkins, Tompkins, William A. McGahanBooks.org participates in affiliate programs including Bookshop.org and the Amazon Services LLC Associates Program. We may earn a commission from qualifying purchases made through links on this page, at no additional cost to you.
Overview
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
Synopsis
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
Booknews
Deals with measurement and analytical aspects of ellipsometry and reflectometry, for casual users of these two spectroscopic optical techniques. Coverage includes fundamentals of polarized light and ellipsometry, the nature of optical constants of materials, instrumental aspects of reflectometers, ellipsometric spectra, and single-wavelength ellipsometry. Discusses the analytical approach for collecting and analyzing ellipsometric and reflectance data, and looks at thin films and roughness. Includes a series of step-by-step prototypical analyses, and background appendices. Annotation c. by Book News, Inc., Portland, Or.