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Physics of Light - Optics
User's Guide to Ellipsometry by Harland G. Tompkins β€” book cover

User's Guide to Ellipsometry

by Harland G. Tompkins
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Overview

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 14 case studies illustrate concepts and applications. Three appendices provide helpful references. 1993 edition.

Synopsis

Text for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 1993 edition.

Booknews

For technologists without much background in physical optics, explains some of the less elementary applications and methods of ellipsometry, a technique for studying surfaces and thin films that is used extensively in integrated circuit manufacture and development, corrosion science, and other areas. Assumes the reader has an instrument in working order, and uses the standard settings and values. Annotation c. Book News, Inc., Portland, OR (booknews.com)

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Editorials

Booknews

For technologists without much background in physical optics, explains some of the less elementary applications and methods of ellipsometry, a technique for studying surfaces and thin films that is used extensively in integrated circuit manufacture and development, corrosion science, and other areas. Assumes the reader has an instrument in working order, and uses the standard settings and values. Annotation c. Book News, Inc., Portland, OR (booknews.com)

Book Details

Published
July 1, 2006
Publisher
Dover Publications
Pages
272
Format
Paperback
ISBN
9780486450285

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