Chemical Elements, Electronics - Semiconductors, Solid State Physics - General & Miscellaneous
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Overview
Silicon carbide (SiC) is a wide bandgap semiconductor whose properties make it suitable for for devices and integrated circuits operating at high voltage, high frequency and high temperature. The second book in the "EMIS Processing" series explains why SiC is so useful in electronics, gives clear guidance on the various processing steps (growth, doping, etching, contact formation, dielectrics, etc.) and describes how these are integrated in device manufacture.Synopsis
Silicon carbide (SiC) is a wide bandgap semiconductor whose properties make it suitable for for devices and integrated circuits operating at high voltage, high frequency and high temperature. The second book in the "EMIS Processing" series explains why SiC is so useful in electronics, gives clear guidance on the various processing steps (growth, doping, etching, contact formation, dielectrics, etc.) and describes how these are integrated in device manufacture.
Book Details
Published
November 1, 2002
Publisher
Institution of Engineering and Technology (IET)
Pages
176
Format
Hardcover
ISBN
9780852969984