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Technology - General & Miscellaneous, Chemical Elements, Electronics - Semiconductors, Solid State Physics - General & Miscellaneous
Metal Impurities in Silicon-Device Fabrication by Klaus Graff β€” book cover

Metal Impurities in Silicon-Device Fabrication

by Klaus Graff
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Overview

A discussion of the different mechanisms responsible for contamination together with a survey of their impact on device performance. The author examines the specific properties of main and rare impurities in silicon, as well as the detection methods and requirements in modern technology. Finally, impurity gettering is studied along with modern techniques to determine gettering efficiency. Throughout all of these subjects, the book presents only reliable and up-to-date data so as to provide a thorough review of recent scientific investigations.

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Book Details

Published
July 31, 2012
Publisher
Springer-Verlag New York, LLC
Pages
225
Format
Hardcover
ISBN
9783642975950

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